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Direct-write non-linear photolithography for semiconductor nanowire characterization

Parkinson, Patrick; Jiang, Nian; Gao, Qiang; Jagadish, Chennupati; Tan, Hark Hoe


A practical bottleneck prohibiting the rapid, confident and damage-free electrical contacting of vapour-liquid-solid grown nanowires arises from the random spatial distribution and variation in quality of the nanowires, and the contact dimensions required. Established techniques such as electron-beam lithography or focused ion-beam deposition have challenges in scaling, damage or complexity that can make a large statistical sample difficult. We present a direct laser-writing technique to allow...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: Nanotechnology
DOI: 10.1088/0957-4484/23/33/335704


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