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Rapid thermal annealing of Ti-rich TiNi thin films: A new approach to fabricate patterned shape memory thin films

Motemani, Y; Tan, M J; White, Timothy; Huang, W M


This paper reports the rapid thermal annealing (RTA) of Ti-rich TiNi thin films, synthesized by the co-sputtering of TiNi and Ti targets. Long-range order of aperiodic alloy could be achieved in a few seconds with the optimum temperature of 773. K. Longer annealing (773. K/240. s), transformed the film to a poorly ordered vitreous phase, suggesting a novel method for solid state amorphization. Reitveld refinement analyses showed significant differences in structural parameters of the films...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: Materials and Design
DOI: 10.1016/j.matdes.2010.07.039


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