Effect of hole shapes on the reliability of deeply-etched InP-based photonic crystal devices
We present systematic evaluation of the optical transmission characteristics of a set of photonic crystal waveguides (PhCWs) fabricated by two schemes. An optimized hole-reshaping process to obtain cylindrical holes was applied in one scheme and a comparison is made with as-etched PhCWs. The spectral characteristics of the transmission mini- stopband (MSB) in identical waveguides show that the reliability, in terms of spectral position and shape, of fabricated PhCWs using the hole reshaping...[Show more]
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|Source:||Physica Status Solidi (C) Current Topics in Solid State Physics|
|01_Shahid_Effect_of_hole_shapes_on_the_2012.pdf||765.17 kB||Adobe PDF||Request a copy|
|02_Shahid_Effect_of_hole_shapes_on_the_2012.pdf||915.72 kB||Adobe PDF||Request a copy|
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