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Effect of hole shapes on the reliability of deeply-etched InP-based photonic crystal devices

Shahid, Naeem; Naureen, Shagufta; Anand, S

Description

We present systematic evaluation of the optical transmission characteristics of a set of photonic crystal waveguides (PhCWs) fabricated by two schemes. An optimized hole-reshaping process to obtain cylindrical holes was applied in one scheme and a comparison is made with as-etched PhCWs. The spectral characteristics of the transmission mini- stopband (MSB) in identical waveguides show that the reliability, in terms of spectral position and shape, of fabricated PhCWs using the hole reshaping...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
URI: http://hdl.handle.net/1885/64998
Source: Physica Status Solidi (C) Current Topics in Solid State Physics
DOI: 10.1002/pssc.201100670

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