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Influence of pulse duration on the doping quality in laser chemical processing (LCP) - A simulative approach

Fell, Andreas; Granek, Filip


The laser chemical processing (LCP) technique for the local doping of crystalline silicon solar cells is investigated. Here, a liquid jet containing a dopant source acts as a waveguide for pulsed laser light, which results in the melting and subsequent do

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
Source: Applied Physics A: Materials Science and Processing
DOI: 10.1007/s00339-012-7144-7


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