Nanometer germanium photodetector with aluminum surface plasmon antenna for enhanced photo-response
We present theoretical design process for plasmon-enhanced photodetectors with nanometer-scale germanium area. The nontraditional plasmonic metal aluminum is employed as the material of surface plasmon antenna instead of noble metals owing to its integration compatibility with existing silicon complementary metal-oxide-semiconductor technology. The electrode/antenna is patterned with shallow concentric grating surrounding a subwavelength aperture (bull's eye structure) for concentrating and...[Show more]
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|Source:||Proceedings of SPIE - The International Society for Optical Engineering|
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