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Role of hydrogen in the surface passivation of crystalline silicon by sputtered aluminum oxide

Li, Tsu-Tsung (Andrew); Cuevas, Andres


Aluminum oxide films can provide excellent surface passivation on both p-type and n-type surfaces of silicon wafers and solar cells. Even though radio frequency magnetron sputtering is capable of depositing aluminum oxide with concentrations of negative charges comparable to some of the other deposition methods, the surface passivation has not been as good. In this paper, we compare the composition and bonding of aluminum oxide deposited by thermal atomic layer deposition and sputtering, and...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: Progress in Photovoltaics: Research and Applications
DOI: 10.1002/pip.1031


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