Skip navigation
Skip navigation

Characterization of boron surface doping effects on PECVD silicon nitride passivation

Nursam, Natalita; Weber, Klaus; Ren, Yongling

Description

In this paper, we investigate the dependence of surface recombination of B diffused and undiffused PECVD SiNx passivated emitters on the net electrostatic charge density. We show that the application of positive surface charge results in a significant increase in the surface recombination of PECVD SiNx passivated B diffused emitters, even for high B surface concentrations. On the other hand, negative charge causes a substantial reduction in surface recombination. Under accumulation conditions,...[Show more]

CollectionsANU Research Publications
Date published: 2010
Type: Conference paper
URI: http://hdl.handle.net/1885/62994
Source: Proceedings of PVSC 2010
DOI: 10.1109/PVSC.2010.5616740

Download

File Description SizeFormat Image
01_Nursam_Characterization_of_boron_2010.pdf650.06 kBAdobe PDF    Request a copy


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  12 November 2018/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator