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Characterization of boron surface doping effects on PECVD silicon nitride passivation

Nursam, Natalita; Weber, Klaus; Ren, Yongling


In this paper, we investigate the dependence of surface recombination of B diffused and undiffused PECVD SiNx passivated emitters on the net electrostatic charge density. We show that the application of positive surface charge results in a significant increase in the surface recombination of PECVD SiNx passivated B diffused emitters, even for high B surface concentrations. On the other hand, negative charge causes a substantial reduction in surface recombination. Under accumulation conditions,...[Show more]

CollectionsANU Research Publications
Date published: 2010
Type: Conference paper
Source: Proceedings of PVSC 2010
DOI: 10.1109/PVSC.2010.5616740


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