Ren, Yongling; Nursam, Natalita; Wang, Da; Weber, Klaus
Negatively charged dielectric films are of great interest for application to silicon solar cells, since such films offer the possibility of excellent passivation of p type surfaces. This paper investigates the distribution and stability of negative charge in silicon dioxide / LPCVD silicon nitride films which have been negatively charged through the injection of electrons from the silicon substrate. High densities of negative charge (5-10×1012cm-2) can be stored in the silicon nitride films....[Show more]
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.