Wu, Wei-Zong; Fu, Li-Hua; Lu, Hai; Ren, Fang-Fang; Chen, Dunjun; Zhang, R.; Zheng, Youdou
Edge termination is one of the key technologies for fabricating high voltage Schottky barrier diodes (SBDs), which could effectively reduce the peak electric field along the Schottky contact edge and enhance the breakdown voltage. We adopt a high-resistivity ring structure as the edge termination for planar GaN SBDs. The edge termination is formed by self-aligned boron implantation on the edge of devices to form a highly damaged layer. In the implant dose and energy ranges studied...[Show more]
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