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Nanostencil Lithography for fabrication of III-V nanostructures

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Vora, Kaushal; Karouta, Fouad; Jagadish, Chennupati

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Nanostencil Lithography (NStL), while comparatively still in infant stages, is proving to be a viable option for low-cost and high resolution fabrication. An ideal stencil for NStL consists of a low-stressed silicon nitride membrane supported on a silicon

dc.contributor.authorVora, Kaushal
dc.contributor.authorKarouta, Fouad
dc.contributor.authorJagadish, Chennupati
dc.coverage.spatialSan Diego United States of America
dc.date.accessioned2015-12-10T22:58:29Z
dc.date.createdAugust 27-29 2013
dc.identifier.isbn9780819496669
dc.identifier.urihttp://hdl.handle.net/1885/60872
dc.description.abstractNanostencil Lithography (NStL), while comparatively still in infant stages, is proving to be a viable option for low-cost and high resolution fabrication. An ideal stencil for NStL consists of a low-stressed silicon nitride membrane supported on a silicon
dc.publisherSPIE - The International Society for Optical Engineering
dc.relation.ispartofseriesNanoengineering: Fabrication, Properties, Optics, and Devices X
dc.rightsAuthor/s retain copyright
dc.sourceProceedings of SPIE - The International Society for Optical Engineering
dc.titleNanostencil Lithography for fabrication of III-V nanostructures
dc.typeConference paper
local.description.notesImported from ARIES
local.description.refereedYes
dc.date.issued2013
local.identifier.absfor020504 - Photonics, Optoelectronics and Optical Communications
local.identifier.ariespublicationU3594520xPUB570
local.type.statusPublished Version
local.contributor.affiliationVora, Kaushal, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationKarouta, Fouad, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.bibliographicCitation.startpage88161B-1 - 88161B-7
local.identifier.doi10.1117/12.2022609
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
dc.date.updated2015-12-10T08:07:07Z
local.identifier.scopusID2-s2.0-84886708233
local.identifier.thomsonID000325972900023
dcterms.accessRightsOpen Access
CollectionsANU Research Publications

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