Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si
Naureen, S; Shahid, Naeem; Dev, A; Anand, S
Description
High material quality InP-based multilayer nanopillar (NP) arrays are fabricated using a combination of self-assembly of silica particles for mask generation and dry etching. In particular, the NP arrays are made from user-defined epitaxial multilayer sta
| Collections | ANU Research Publications |
|---|---|
| Date published: | 2013 |
| Type: | Journal article |
| URI: | http://hdl.handle.net/1885/60808 |
| Source: | Nanotechnology |
| DOI: | 10.1088/0957-4484/24/22/225301 |
Download
| File | Description | Size | Format | Image |
|---|---|---|---|---|
| 01_Naureen_Generation_of_substrate-free_2013.pdf | 1.23 MB | Adobe PDF | Request a copy |
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