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Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si

Naureen, S; Shahid, Naeem; Dev, A; Anand, S

Description

High material quality InP-based multilayer nanopillar (NP) arrays are fabricated using a combination of self-assembly of silica particles for mask generation and dry etching. In particular, the NP arrays are made from user-defined epitaxial multilayer sta

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
URI: http://hdl.handle.net/1885/60808
Source: Nanotechnology
DOI: 10.1088/0957-4484/24/22/225301

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