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Fabrication of Submicron Structures by Three-Dimensional Laser Lithography

Shishkin, I I; Rybin, M V; Samusev, K B; Limonov, M F; Kiyan, R V; Chichkov, B N; Kivshar, Yuri; Belov, Pavel

Description

As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersio

CollectionsANU Research Publications
Date published: 2014
Type: Journal article
URI: http://hdl.handle.net/1885/60446
Source: Journal of Experimental and Theoretical Physics Letters
DOI: 10.1134/S0021364014090112

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