Fabrication of Submicron Structures by Three-Dimensional Laser Lithography
As a demonstration of unique capabilities of three-dimensional laser lithography, an example complex-shape microobject and photonic crystals with “woodpile” structure for the infrared spectral range are fabricated by this technique. Photonic dispersio
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|Source:||Journal of Experimental and Theoretical Physics Letters|
|01_Shishkin_Fabrication_of_Submicron_2014.pdf||903.07 kB||Adobe PDF||Request a copy|
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