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Effect of substrate on hydrogen in and out diffusion from a-Si : H thin films

Rao, Rui; Kail, F; Roca i Cabarrocas, P


We present a detailed study on the effect of the substrate on the structure and hydrogen evolution from p-type hydrogenated amorphous silicon thin films co-deposited on the grounded and RF electrodes of an asymmetric radio frequency glow discharge reactor, as well as the similar films exposed to an hydrogen plasma. We used spectroscopic ellipsometry and hydrogen evolution measurements to analyze the effects of the substrate, ion energy and hydrogen plasma on the films microstructure, thickness,...[Show more]

CollectionsANU Research Publications
Date published: 2007
Type: Journal article
Source: Journal of Materials Science: Materials in Electronics
DOI: 10.1007/s10854-007-9123-x


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