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Influence of oxygen on the sputtering of aluminum oxide for the surface passivation of crystallinen silicon

Li, Tsu-Tsung (Andrew); Ruffell, Simon; Tucci, Mario; Mansoulie, Yves; Samundsett, Christian; De Iullis, Simona; Serenelli, Luca; Cuevas, Andres


While sputtering has been shown to be capable of depositing aluminum oxide suitable for surface passivation, the mechanisms for this are yet to be firmly established and its potential realized. In this paper, we investigate the relationships between the oxygen in the sputtering process to the resulting composition of the deposited film and the surface passivation obtained. We find that surface passivation is not strongly dependent on the bulk composition of the film. Instead the results...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: Solar Energy Materials and Solar Cells
DOI: 10.1016/j.solmat.2010.03.034


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