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Fabrication of low loss Chalcogenide glass waveguide via thermal nanoimprint lithography

Han, Ting; Madden, Steve; Bulla, Douglas; Luther-Davies, Barry


We report the fabrication of Chalcogenide glass rib waveguides by thermal nano-imprint. Waveguides 2-4μm wide and 1μm high were fabricated with optical losses of 0.26dB/cm and 0.27dB/cm for TM and TE polarizations at 1550nm.

CollectionsANU Research Publications
Date published: 2010
Type: Conference paper
Source: 2010 conference on Optoelectronic and Microelectronic Materials and Devices Proceedings
DOI: 10.1109/COMMAD.2010.5699775


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