Submicrometer-Thick Low-Loss As 2 S 3 Planar Waveguides for Nonlinear Optical Devices
We describe a fabrication process for and the characterization of submicrometer-thick As2S3 waveguides. Poly(methylmethacrylate) and bottom antireflective coating were employed as thin protective layers prior to photoresist patterning in order to prevent
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|Source:||IEEE Photonics Technology Letters|
|01_Choi_Submicrometer-Thick_Low-Loss_2010.pdf||406.38 kB||Adobe PDF||Request a copy|
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