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Submicrometer-Thick Low-Loss As 2 S 3 Planar Waveguides for Nonlinear Optical Devices

Choi, Duk-Yong; Madden, Steve; Bulla, Douglas; Wang, Rongping; Rode, Andrei V; Luther-Davies, Barry

Description

We describe a fabrication process for and the characterization of submicrometer-thick As2S3 waveguides. Poly(methylmethacrylate) and bottom antireflective coating were employed as thin protective layers prior to photoresist patterning in order to prevent

CollectionsANU Research Publications
Date published: 2010
Type: Journal article
URI: http://hdl.handle.net/1885/56747
Source: IEEE Photonics Technology Letters
DOI: 10.1109/LPT.2010.2040170

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