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Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas

Corr, Cormac; Despiau-Pujo, E; Chabert, Pascal; Graham, W G; Marro, F.G.; Graves, David B


Comparisons of 2D fluid simulations with experimental measurements of Ar/Cl2 plasmas in a low-pressure inductively coupled reactor are reported. Simulations show that the wall recombination coefficient of Cl atom (γ) is a crucial parameter of the model a

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/41/18/185202


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