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Brittle materials in nano-abrasive fabrication of optical mirror-surfaces

Yin, Ling; Huang, Han


The objective of this investigation was to evaluate the response of a wide range of brittle materials (polycrystalline silicon carbide, single-crystal 6H-SiC (0 0 0 1) substrate, tungsten carbide composite, and amorphous glass-inlaid stabilized tetragonal polycrystalline zirconia) to nano-abrasive fabrication for optical mirrors. Ultra-precision grinding and polishing were employed to investigate the generation of surfaces, and white light interferometry was used for surface quality assessment....[Show more]

CollectionsANU Research Publications
Date published: 2007
Type: Journal article
Source: Precision Engineering
DOI: 10.1016/j.precisioneng.2007.09.001


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