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Brittle materials in nano-abrasive fabrication of optical mirror-surfaces

Yin, Ling; Huang, Han

Description

The objective of this investigation was to evaluate the response of a wide range of brittle materials (polycrystalline silicon carbide, single-crystal 6H-SiC (0 0 0 1) substrate, tungsten carbide composite, and amorphous glass-inlaid stabilized tetragonal polycrystalline zirconia) to nano-abrasive fabrication for optical mirrors. Ultra-precision grinding and polishing were employed to investigate the generation of surfaces, and white light interferometry was used for surface quality assessment....[Show more]

dc.contributor.authorYin, Ling
dc.contributor.authorHuang, Han
dc.date.accessioned2015-12-10T22:34:52Z
dc.identifier.issn0141-6359
dc.identifier.urihttp://hdl.handle.net/1885/56048
dc.description.abstractThe objective of this investigation was to evaluate the response of a wide range of brittle materials (polycrystalline silicon carbide, single-crystal 6H-SiC (0 0 0 1) substrate, tungsten carbide composite, and amorphous glass-inlaid stabilized tetragonal polycrystalline zirconia) to nano-abrasive fabrication for optical mirrors. Ultra-precision grinding and polishing were employed to investigate the generation of surfaces, and white light interferometry was used for surface quality assessment. Results were examined with regard to the dependence of fabrication quality on material properties. We found that surface roughness in ultra-precision grinding increased with brittleness, following a simple exponential law, except for zirconia. The occurrence of a phase transformation in nano-fabrication of zirconia resulted in rough surfaces.
dc.publisherElsevier
dc.sourcePrecision Engineering
dc.subjectKeywords: Abrasives; Amorphous silicon; Brittleness; Cladding (coating); Fracture mechanics; Grinding (comminution); Grinding (machining); Grinding mills; Mirrors; Nonmetals; Optical design; Optical glass; Polycrystalline materials; Polysilicon; Silicon; Silicon ca Brittle materials; Brittleness; Fabrication; Nanometer roughness; Optical mirror surface
dc.titleBrittle materials in nano-abrasive fabrication of optical mirror-surfaces
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolumeOnline
dc.date.issued2007
local.identifier.absfor091201 - Ceramics
local.identifier.ariespublicationu4251866xPUB349
local.type.statusPublished Version
local.contributor.affiliationYin, Ling, College of Engineering and Computer Science, ANU
local.contributor.affiliationHuang, Han, University of Queensland
local.description.embargo2037-12-31
local.bibliographicCitation.issuePRE-5581
local.bibliographicCitation.startpage1
local.bibliographicCitation.lastpage6
local.identifier.doi10.1016/j.precisioneng.2007.09.001
local.identifier.absseo861002 - Ceramics
dc.date.updated2015-12-09T10:23:38Z
local.identifier.scopusID2-s2.0-48549089456
CollectionsANU Research Publications

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