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Amorphization and graphitization of single-crystal diamond - A transmission electron microscopy study

Hickey, D P; Jones, K S; Elliman, Robert


The amorphization and graphitization of single-crystal diamond by ion implantation were explored using transmission electron microscopy (TEM). The effect of ion implantation and annealing on the microstructure was studied in (100) diamond substrates Si+ implanted at 1 MeV. At a dose of 1 × 1015 cm- 2, implants done at 77 K showed a damage layer that evolves into amorphous pockets upon annealing at 1350 °C for 24 h whereas room temperature implants (303 K) recovered to the original defect free...[Show more]

CollectionsANU Research Publications
Date published: 2009
Type: Journal article
Source: Diamond and Related Materials
DOI: 10.1016/j.diamond.2009.08.012


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