Elasto-plastic characterisation of low-temperature plasma-deposited silicon nitride thin films using nanoindentation
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Mariusz, Martyniuk; Musca, Charles Anthony; Dell, John Marcel; Elliman, Robert; Faraone, Lorenzo
Description
Nanoindentation has been utilised in order to investigate the mechanical properties of low-temperature (50-300°C) plasma-deposited SiNx thin films for applications of micro-electro-mechanical systems on temperature sensitive, non-standard substrates. It
| Collections | ANU Research Publications |
|---|---|
| Date published: | 2009 |
| Type: | Journal article |
| URI: | http://hdl.handle.net/1885/54523 |
| Source: | International Journal of Surface Science and Engineering |
| DOI: | 10.1504/IJSURFSE.2009.024359 |
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| File | Description | Size | Format | Image |
|---|---|---|---|---|
| 01_Mariusz_Elasto-plastic_2009.pdf | 39.96 kB | Adobe PDF | Request a copy | |
| 02_Mariusz_Elasto-plastic_2009.pdf | 588.66 kB | Adobe PDF | Request a copy |
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