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Low loss stoichiometric TeO2 thin films and waveguides

Vu, Khu; Madden, Steve; Luther-Davies, Barry


Stoichiometric low loss Tellurium dioxide, TeO2, films have been produced by reactive magnetron RF sputtering. Long rib waveguides with very low loss are fabricated using reactive ion etching techniques. As-deposited TeO2 films and waveguides with propagation loss around or below 0.1dB/cm at 1550nm have been achieved.

CollectionsANU Research Publications
Date published: 2009
Type: Conference paper
Source: Proceedings of CLEO / Europe-EQEC 2009


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