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Growth and Characterisation of InAs/GaAs Quantum Dots grown by MOCVD

Stewart Sears, Kalista; Wong-Leung, Jennifer; Buda, Manuela; Jagadish, Chennupati; Tan, Hark Hoe


InAs/GaAs quantum dots (QDs) were grown by low pressure Metal-Organic Chemical Vapour Deposition in the Stranski-Krastanow growth mode. We describe the influence of growth parameters such as coverage, the V/III ratio, growth temperature and growth interrupts on the QD nucleation and the importance of avoiding formation of larger islands which are particularly susceptible to dislocations. After an extensive study of these growth parameters we are now able to achieve device quality InAs/GaAs QDs...[Show more]

CollectionsANU Research Publications
Date published: 2005
Type: Conference paper
Source: 2004 Conference on Optoelectronic and Microelectronic Materials and Devices Proceedings
DOI: 10.1109/COMMAD.2004.1577477


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