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Propagating double layers in electronegative plasmas

Meige, Albert; Plihon, N.; Hagelaar, Gerjan; Boeuf, Jean-Pierre; Chabert, Pascal; Boswell, Roderick

Description

Double layers have been observed to propagate from the source region to the diffusion chamber of a helicon-type reactor filled up with a low-pressure mixture of Ar SF6 [N. Plihon, J. Appl. Phys. 98, 023306 (2005)]. In the present paper the most significant and new experimental results are reported. A fully self-consistent hybrid model in which the electron energy distribution function, the electron temperature, and the various source terms are calculated is developed to investigate these...[Show more]

dc.contributor.authorMeige, Albert
dc.contributor.authorPlihon, N.
dc.contributor.authorHagelaar, Gerjan
dc.contributor.authorBoeuf, Jean-Pierre
dc.contributor.authorChabert, Pascal
dc.contributor.authorBoswell, Roderick
dc.date.accessioned2015-12-10T22:26:03Z
dc.identifier.issn1070-664X
dc.identifier.urihttp://hdl.handle.net/1885/53747
dc.description.abstractDouble layers have been observed to propagate from the source region to the diffusion chamber of a helicon-type reactor filled up with a low-pressure mixture of Ar SF6 [N. Plihon, J. Appl. Phys. 98, 023306 (2005)]. In the present paper the most significant and new experimental results are reported. A fully self-consistent hybrid model in which the electron energy distribution function, the electron temperature, and the various source terms are calculated is developed to investigate these propagating double layers. The spontaneous formation of propagating double layers is only observed in the simulation for system in which the localized inductive heating is combined with small diameter chambers. The conditions of formation and the properties of the propagating double layers observed in the simulation are in good agreement with that of the experiment. By correlating the results of the experiment and the simulation, a formation mechanism compatible with ion two-stream instability is proposed.
dc.publisherAmerican Institute of Physics (AIP)
dc.sourcePhysics of Plasmas
dc.subjectKeywords: Computer simulation; Diffusion; Distribution functions; Electron energy levels; Electron temperature; Electronegativity; Diffusion chamber; Double layers; Electron energy distribution function; Electromagnetic wave propagation in plasma
dc.titlePropagating double layers in electronegative plasmas
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume14
dc.date.issued2007
local.identifier.absfor020204 - Plasma Physics; Fusion Plasmas; Electrical Discharges
local.identifier.ariespublicationU1408929xPUB282
local.type.statusPublished Version
local.contributor.affiliationMeige, Albert, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationPlihon, N., Ecole Polytechnique
local.contributor.affiliationHagelaar, Gerjan, Universite Paul Sabatier
local.contributor.affiliationBoeuf, Jean-Pierre, Universite Paul Sabatier
local.contributor.affiliationChabert, Pascal, Ecole Polytechnique
local.contributor.affiliationBoswell, Roderick, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.issue053508
local.bibliographicCitation.startpage053508-1-11
local.identifier.doi10.1063/1.2736946
dc.date.updated2015-12-09T09:29:22Z
local.identifier.scopusID2-s2.0-34249864408
CollectionsANU Research Publications

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