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Proton Irradiation Induced Intermixing in InxGa1_xAs/InP Quantum Wells

Gareso, Paulus; Tan, Hoe Hark; Wong-Leung, Yin-Yin (Jennifer); Jagadish, Chennupati; Dao, Lap Van

Description

We have investigated the quantum well interdiffusion of In xGa1-xAs/InP QWs with different In composition using proton irradiation. 50 KeV proton implantation with various doses from 5×1014 H/cm2 to 1×1016 H/cm 2 with subsequent annealing at 750° for 6

CollectionsANU Research Publications
Date published: 2005
Type: Conference paper
URI: http://hdl.handle.net/1885/53210
Source: 2004 Conference on Optoelectronic and Microelectronic Materials and Devices Proceedings
DOI: 10.1109/COMMAD.2004.1577500

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