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Development of a self-aligned etch-back process for selectively doped silicon solar cells

Yan, Di; Cuevas, Andres; Bullock, James; Wan, Yimao


Selectively doped (SD) solar cells have advantages of lower front diffusion recombination, lower contact resistivity and better blue response. In this work, a simple, self-aligned SD solar cell process is presented, eliminating the critical mask alignment step in current SD solar cells. In the new process, the front metal grid is deposited on top of a heavy phosphorus diffusion before the anti-reflection coating. The metal grid, formed in this experiment by evaporating aluminum through a shadow...[Show more]

CollectionsANU Research Publications
Date published: 2014
Type: Conference paper
Source: 2014 IEEE 40th Photovoltaic Specialist Conference, PVSC 2014
DOI: 10.1109/PVSC.2014.6925449


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