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Quantitative measurements of Kikuchi bands in diffraction patterns of backscattered electrons using an electrostatic analyzer

Went, Michael; Winkelmann, Aimo; Vos, Maarten


Diffraction patterns of backscattered electrons can provide important crystallographic information with high spatial resolution. Recently, the dynamical theory of electron diffraction was applied to reproduce in great detail backscattering patterns observed in the scanning electron microscope (SEM). However, a fully quantitative comparison of theory and experiment requires angle-resolved measurements of the intensity and the energy of the backscattered electrons, which is difficult to realize...[Show more]

CollectionsANU Research Publications
Date published: 2009
Type: Journal article
Source: Ultramicroscopy
DOI: 10.1016/j.ultramic.2009.05.004


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