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Ion-Beam-Induced Amorphization and Epitaxial Crystallization of Silicon

Williams, James; de Azevedo, Gustavo; Bernas, Harry; Fortuna, Frank Nicholas


Ion-induced collisions produce athermal atomic movements at and around the surface or interface, inducing step formation and modifying growth conditions. The latter may be controlled by varying the temperature and ion-beam characteristics, guiding the sys

CollectionsANU Research Publications
Date published: 2010
Type: Book chapter
Book Title: Topics in Applied Physics 116: Materials Science with Ion Beams
DOI: 10.1007/978-3-540-88789-8_4


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