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Ion-Beam-Induced Amorphization and Epitaxial Crystallization of Silicon

Williams, James; de Azevedo, Gustavo; Bernas, Harry; Fortuna, Frank Nicholas

Description

Ion-induced collisions produce athermal atomic movements at and around the surface or interface, inducing step formation and modifying growth conditions. The latter may be controlled by varying the temperature and ion-beam characteristics, guiding the sys

CollectionsANU Research Publications
Date published: 2010
Type: Book chapter
URI: http://hdl.handle.net/1885/52190
DOI: 10.1007/978-3-540-88789-8_4

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