Choi, Duk-Yong; Madden, Steve; Rode, Andrei V; Wang, Rongping; Bulla, Douglas; Luther-Davies, Barry
We have developed an effective fabrication process for As2S3 planar waveguides. A bottom anti-reflection coating provides a layer that not only protects the As2S3 film from attack by the alkaline developer but also improves line edge roughness of photo-resist patterns which is a pre-requisite for waveguides with smooth sidewalls. Crown
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