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The Application and Limitations of PECVD for Silicon-based Photonics

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Spooner, Marc

Description

This thesis presents results on the applications and limitations of plasma enhanced chemical vapour deposition for silicon-based photonics, with an emphasis on optical microcavities for the control of light emission from silicon nanocrystals. ¶ ...

CollectionsOpen Access Theses
Date published: 2005
Type: Thesis (PhD)
URI: http://hdl.handle.net/1885/48197
DOI: 10.25911/5d7a2bb70d9fb

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