Oxide/LPCVD nitride stacks on silicon: the effects of high temperature treatments on bulk lifetime and on surface passivation
Silicon dioxide / silicon nitride stacks are potentially useful for solar cell applications due to many favourable properties of the silicon nitride. If the thickness of the oxide and nitride is chosen correctly, an oxide / nitride stack behaves as a near ideal antireflection coating. Nitride layers allow significantly increased process flexibility and hence the realisation of novel cell structures. We used LPCVD deposition and in this paper, show that the effective lifetime of an oxide / LPCVD...[Show more]
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