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Surface passivation of silicon solar cells using plasma-enhanced chemical-vapour-deposited SiN films and thin thermal SiO2/plasma SiN stacks

Schmidt, Jan; Kerr, Mark John; Cuevas, Andres


Two different techniques for the electronic surface passivation of silicon solar cells, the plasma-enhanced chemical vapour deposition of silicon nitride (SiN) and the fabrication of thin thermal silicon oxide/plasma SiN stack structures, are investigated. It is demonstrated that, despite their low thermal budget, both techniques are capable of giving an outstanding surface passivation quality on the low-resistivity (∼1 _ cm) p-Si base as well as on n+-diffused solar cell emitters with the...[Show more]

CollectionsANU Research Publications
Date published: 2001
Type: Journal article
Source: Semiconductor Science and Technology
DOI: 10.1088/0268-1242/16/3/308


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