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Injection-dependent lifetime studies of copper precipitates in silicon

Macdonald, D; Brendle, W; Cuevas, Andres; Istratov, A.A


Copper precipitates have been deliberately formed in single-crystal silicon wafers in order to study their impact on carrier lifetimes. The injection dependence of the measured lifetimes of samples with different dopant type and resistivity reveals the presence of both shallow and deep levels associated with the precipitates, in support of previous DLTS studies. Although such precipitates are expected to produce a continuous range of interacting energy levels, a simple model using only one...[Show more]

CollectionsANU Research Publications
Date published: 2002
Type: Conference paper


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