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Rutherford backscattering using electrons as projectiles: Underlying principles and possible applications

Went, Michael; Vos, Maarten

Description

Ion beam analysis is the method of choice for studying the composition of layers with a thickness exceeding several tens of Å. Recently it has become clear that elastic scattering of keV electrons can be used to determine the surface composition of relat

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
URI: http://hdl.handle.net/1885/39897
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/j.nimb.2008.01.059

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