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Atomic and molecular hydrogen gas temperatures in a low-pressure helicon plasma

Samuell, Cameron; Corr, Cormac


Neutral gas temperatures in hydrogen plasmas are important for experimental and modelling efforts in fusion technology, plasma processing, and surface modification applications. To provide values relevant to these application areas, neutral gas temperatures were measured in a low pressure (<10 mTorr) radiofrequency helicon discharge using spectroscopic techniques. The atomic and molecular species were not found to be in thermal equilibrium with the atomic temperature being mostly larger then...[Show more]

CollectionsANU Research Publications
Date published: 2015
Type: Journal article
Source: Plasma Sources Science and Technology
DOI: 10.1088/0963-0252/24/4/045003


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