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Double-layer ion acceleration triggered by ion magnetization in expanding radiofrequency plasma sources

Takahashi, Kazunori; Charles, Christine; Boswell, Rod W.; Fujiwara, Tamiya


Ion energy distribution functions downstream of the source exit in magnetically expanding low-pressure plasmas are experimentally investigated for four source tube diameters ranging from about 5 to 15 cm. The magnetic-field threshold corresponding to a transition from a simple expanding plasma to a double layer-containing plasma is observed to increase with a decrease in the source tube diameter. The results demonstrate that for the four geometries, the double layer and the accelerated ion beam...[Show more]

CollectionsANU Research Publications
Date published: 2010-10-07
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.3499653


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