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Particle-in-cell simulations of hollow cathode enhanced capacitively coupled radio frequency discharges

Lafleur, T.; Boswell, R. W.

Description

A two-dimensional particle-in-cell simulation has been developed to study density enhancement of capacitively coupled rf discharges with multi-slit electrodes. The observed density increase is shown to result from a hollow cathode effect that takes place within the multi-slit electrode configuration, which forms as a result of secondary electron emission due to ion bombardment. By investigating the ionization and power deposition profiles, it is found that rfsheathheating is too weak to sustain...[Show more]

dc.contributor.authorLafleur, T.
dc.contributor.authorBoswell, R. W.
dc.date.accessioned2015-12-08T22:47:23Z
dc.date.available2015-12-08T22:47:23Z
dc.identifier.issn1070-664X
dc.identifier.urihttp://hdl.handle.net/1885/38202
dc.description.abstractA two-dimensional particle-in-cell simulation has been developed to study density enhancement of capacitively coupled rf discharges with multi-slit electrodes. The observed density increase is shown to result from a hollow cathode effect that takes place within the multi-slit electrode configuration, which forms as a result of secondary electron emission due to ion bombardment. By investigating the ionization and power deposition profiles, it is found that rfsheathheating is too weak to sustain the discharge, and that secondary electron acceleration within the sheath is the primary heating mechanism. Due to a capacitive voltage divider formed by the rfsheaths at each electrode, the area ratio of the powered and ground electrodes is observed to have a strong effect on the resulting discharge, and if the ground electrode area is too small, the voltage drop at the powered electrode is too low to sustain a hollow cathodedischarge.
dc.description.sponsorshipThe authors gratefully acknowledge financial support from the Lam Research Corporation.
dc.publisherAmerican Institute of Physics (AIP)
dc.rightshttp://www.sherpa.ac.uk/romeo/issn/1070-664X..."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 8/12/15). Copyright 2012 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Physics of Plasmas and may be found at https://doi.org/10.1063/1.3685709
dc.sourcePhysics of Plasmas
dc.subjectKeywords: Area ratios; Capacitive voltage dividers; Capacitively coupled; Capacitively coupled RF discharge; Density enhancement; Electrode configurations; Heating mechanisms; Hollow cathode discharge; Hollow cathode effect; Hollow cathodes; Particle-in-cell simula
dc.titleParticle-in-cell simulations of hollow cathode enhanced capacitively coupled radio frequency discharges
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume19
dc.date.issued2012
local.identifier.absfor020204
local.identifier.ariespublicationu4695161xPUB90
local.publisher.urlhttps://www.aip.org/
local.type.statusPublished Version
local.contributor.affiliationLafleur, Trevor, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Plasma Research Laboratory, The Australian National University
local.contributor.affiliationBoswell, Roderick, College of Physical and Mathematical Sciences, CPMS Research School of Physics and Engineering, Plasma Research Laboratory, The Australian National University
local.bibliographicCitation.issue2
local.bibliographicCitation.startpage023508
local.bibliographicCitation.lastpage12
local.identifier.doi10.1063/1.3685709
dc.date.updated2016-02-24T11:20:08Z
local.identifier.scopusID2-s2.0-84857853126
local.identifier.thomsonID000301395800066
CollectionsANU Research Publications

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