Particle-in-cell simulations of hollow cathode enhanced capacitively coupled radio frequency discharges
A two-dimensional particle-in-cell simulation has been developed to study density enhancement of capacitively coupled rf discharges with multi-slit electrodes. The observed density increase is shown to result from a hollow cathode effect that takes place within the multi-slit electrode configuration, which forms as a result of secondary electron emission due to ion bombardment. By investigating the ionization and power deposition profiles, it is found that rfsheathheating is too weak to sustain...[Show more]
|Collections||ANU Research Publications|
|Source:||Physics of Plasmas|
|01_Lafleur_Particle-in-cell_simulations_2012.pdf||Published Version||3.83 MB||Adobe PDF|
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