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Particle-in-cell simulations of hollow cathode enhanced capacitively coupled radio frequency discharges

Lafleur, T.; Boswell, R. W.

Description

A two-dimensional particle-in-cell simulation has been developed to study density enhancement of capacitively coupled rf discharges with multi-slit electrodes. The observed density increase is shown to result from a hollow cathode effect that takes place within the multi-slit electrode configuration, which forms as a result of secondary electron emission due to ion bombardment. By investigating the ionization and power deposition profiles, it is found that rfsheathheating is too weak to sustain...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
URI: http://hdl.handle.net/1885/38202
Source: Physics of Plasmas
DOI: 10.1063/1.3685709

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