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Patterning of inorganic polymer glass waveguiding films by dry etching

Madden, Steve; Zhang, Yang; Luther-Davies, Barry; Charters, Robbie

Description

Polymer waveguides have long been of interest for low cost integrated optical devices. Inorganic Polymer glasses are a class of materials based around polysiloxanes which have many attractive features for low cost integrated optics and meet the stringent

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
URI: http://hdl.handle.net/1885/37271
Source: Proceedings of SPIE - Progress in Biomedical Optics and Imaging
DOI: 10.1117/12.760843

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