Skip navigation
Skip navigation

Patterning of inorganic polymer glass waveguiding films by dry etching

Madden, Steve; Zhang, Yang; Luther-Davies, Barry; Charters, Robbie


Polymer waveguides have long been of interest for low cost integrated optical devices. Inorganic Polymer glasses are a class of materials based around polysiloxanes which have many attractive features for low cost integrated optics and meet the stringent

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
Source: Proceedings of SPIE - Progress in Biomedical Optics and Imaging
DOI: 10.1117/12.760843


File Description SizeFormat Image
01_Madden_Patterning_of_inorganic_2008.pdf604.8 kBAdobe PDF    Request a copy

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  17 November 2022/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator