Patterning of inorganic polymer glass waveguiding films by dry etching
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Altmetric Citations
Madden, Steve; Zhang, Yang; Luther-Davies, Barry; Charters, Robbie
Description
Polymer waveguides have long been of interest for low cost integrated optical devices. Inorganic Polymer glasses are a class of materials based around polysiloxanes which have many attractive features for low cost integrated optics and meet the stringent
| Collections | ANU Research Publications |
|---|---|
| Date published: | 2008 |
| Type: | Journal article |
| URI: | http://hdl.handle.net/1885/37271 |
| Source: | Proceedings of SPIE - Progress in Biomedical Optics and Imaging |
| DOI: | 10.1117/12.760843 |
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| File | Description | Size | Format | Image |
|---|---|---|---|---|
| 01_Madden_Patterning_of_inorganic_2008.pdf | 604.8 kB | Adobe PDF | Request a copy |
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