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Thickness-dependent phase transformation in nanoindented germanium thin films

Oliver, David; Bradby, Jodie; Williams, James; Swain, Michael Vincent; Munroe, Paul


We investigate the mechanical response of 50-600 nm epitaxial Ge films on a Si substrate using nanoindentation with a nominally spherical (R≈4.3 νm) diamond tip. The inelastic deformation mechanism is found to depend critically on the film thickness. S

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
Source: Nanotechnology
DOI: 10.1088/0957-4484/19/47/475709


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