Defects in Ge and Si caused by 1 MeV Si+ implantation
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Hickey, D P; Bryan, Z L; Jones, K S; Elliman, Robert; Haller, E E
Description
Cross-sectional transmission electron microscopy was used to study defect formation and evolution in the (001) Ge and Si wafers implanted with 1 MeV Si+ and 40 keV Si+ at a dose of 1× 1014 cm-2. As expected, upon annealing, the {311} extended defects for
Collections | ANU Research Publications |
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Date published: | 2008 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/35396 |
Source: | Journal of Vacuum Science and Technology B |
DOI: | 10.1116/1.2834557 |
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