Spatial evolution of EEPFs in a millimetre scale radio frequency argon plume
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Dixon, Sam; Charles, Christine; Boswell, Roderick
Description
The characteristics of a plume expanding from a 13.56 MHz rf hollow cathode discharge in argon were investigated using a compensated Langmuir probe and an emissive probe. Particular attention was paid to the spatial evolution of the electron energy probab
Collections | ANU Research Publications |
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Date published: | 2013 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/34021 |
Source: | Journal of Physics D: Applied Physics |
DOI: | 10.1088/0022-3727/46/36/365202 |
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01_Dixon_Spatial_evolution_of_EEPFs_in_2013.pdf | 727.85 kB | Adobe PDF | Request a copy |
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