Spatial evolution of EEPFs in a millimetre scale radio frequency argon plume
The characteristics of a plume expanding from a 13.56 MHz rf hollow cathode discharge in argon were investigated using a compensated Langmuir probe and an emissive probe. Particular attention was paid to the spatial evolution of the electron energy probab
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|Source:||Journal of Physics D: Applied Physics|
|01_Dixon_Spatial_evolution_of_EEPFs_in_2013.pdf||727.85 kB||Adobe PDF||Request a copy|
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