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Spatial evolution of EEPFs in a millimetre scale radio frequency argon plume

Dixon, Sam; Charles, Christine; Boswell, Roderick

Description

The characteristics of a plume expanding from a 13.56 MHz rf hollow cathode discharge in argon were investigated using a compensated Langmuir probe and an emissive probe. Particular attention was paid to the spatial evolution of the electron energy probab

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
URI: http://hdl.handle.net/1885/34021
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/46/36/365202

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