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Nano-phase separation of Arsenic Tri-sulphide (As 2 S 3 ) film and its effect on Plasma Etching

Madden, Steve; Wang, Rongping; Rode, Andrei V; Krolikowska, Maryla; Luther-Davies, Barry; Choi, Duk-Yong

Description

We present evidence of nano-scale phase separation in amorphous arsenic tri-sulphide films prepared by ultra-fast pulsed laser deposition based on Raman spectroscopy, X-ray photo-electron spectroscopy, and atomic force microscopy. We also show the results from plasma etching this material and conclude that the grainy structure of etched surfaces comes from the differential chemical etch rates of the different phases.

dc.contributor.authorMadden, Steve
dc.contributor.authorWang, Rongping
dc.contributor.authorRode, Andrei V
dc.contributor.authorKrolikowska, Maryla
dc.contributor.authorLuther-Davies, Barry
dc.contributor.authorChoi, Duk-Yong
dc.date.accessioned2015-12-08T22:27:00Z
dc.identifier.issn0022-3093
dc.identifier.urihttp://hdl.handle.net/1885/33880
dc.description.abstractWe present evidence of nano-scale phase separation in amorphous arsenic tri-sulphide films prepared by ultra-fast pulsed laser deposition based on Raman spectroscopy, X-ray photo-electron spectroscopy, and atomic force microscopy. We also show the results from plasma etching this material and conclude that the grainy structure of etched surfaces comes from the differential chemical etch rates of the different phases.
dc.publisherElsevier
dc.sourceJournal of Non-crystalline Solids
dc.subjectKeywords: Arsenic compounds; Atomic force microscopy; Chalcogenides; Phase separation; Plasma etching; Pulsed laser deposition; Raman spectroscopy; X ray photoelectron spectroscopy; Differential chemical etch; Grainy structure; Laser deposition; Thin films Chalcogenides; Laser deposition; Planar waveguides; Raman spectroscopy; UPS/XPS
dc.titleNano-phase separation of Arsenic Tri-sulphide (As 2 S 3 ) film and its effect on Plasma Etching
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume353
dc.date.issued2007
local.identifier.absfor100799 - Nanotechnology not elsewhere classified
local.identifier.absfor091201 - Ceramics
local.identifier.absfor020406 - Surfaces and Structural Properties of Condensed Matter
local.identifier.ariespublicationu9912193xPUB106
local.type.statusPublished Version
local.contributor.affiliationChoi, Duk-Yong, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMadden, Steve, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationWang, Rongping, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationRode, Andrei V, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationKrolikowska, Maryla, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationLuther-Davies, Barry, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.startpage953
local.bibliographicCitation.lastpage955
local.identifier.doi10.1016/j.jnoncrysol.2006.12.102
dc.date.updated2015-12-08T09:16:25Z
local.identifier.scopusID2-s2.0-33947413162
CollectionsANU Research Publications

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