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Reduced feature size and improved quality of liquid jet guided laser processing by controlling the intensity profile

Fell, Andreas; Hopman, Sybille; Vago, Nandor; Kluska, Sven; Franklin, Evan; Weber, Klaus


A way to overcome the highly speckled intensity pattern for the liquid jet guided laser processing technique is investigated. Simulations and experiments proof the feasibility of an advantageous "single speckle" pattern.

CollectionsANU Research Publications
Date published: 2014
Type: Conference paper
Source: Light, Energy and the Environment, OSA Technical Digest
DOI: 10.1364/OSE.2014.RW4B.5


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