Reduced feature size and improved quality of liquid jet guided laser processing by controlling the intensity profile
Fell, Andreas; Hopman, Sybille; Vago, Nandor; Kluska, Sven; Franklin, Evan; Weber, Klaus
A way to overcome the highly speckled intensity pattern for the liquid jet guided laser processing technique is investigated. Simulations and experiments proof the feasibility of an advantageous "single speckle" pattern.
|Collections||ANU Research Publications|
|Source:||Light, Energy and the Environment, OSA Technical Digest|
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