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Interactions between arrayed hollow cathodes

Dixon, Sam; Charles, Christine; Boswell, Roderick; Cox, Wes; Holland, John; Gottscho, Richard


An array of novel hollow cathode plasma sources of 4 mm diameter and driven by up to 500 W of 13.56 MHz rf power was constructed. It was investigated using spatially resolved Langmuir probe measurements in the plasma expansion region. Initial results suggest the plasma observed downstream is the combination of a diffusion from the exit orifice of the 30 mm long cylindrical source region and a uniform plasma created in the expansion region. By measuring the ion density of the plasma plumes...[Show more]

CollectionsANU Research Publications
Date published: 2013
Type: Journal article
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/46/14/145204


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