The effect of the annealing ramp rate on the formation of voids in silicon
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Ruffell, Simon; Simpson, Peter J; Knights, Andrew P
Description
We show the strong dependence on annealing ramp rate of residual open-volume defects in silicon following helium ion implantation and annealing. Helium was implanted at 60keV energy, 1 × 1016cm-2 fluence into silicon and subsequently annealed to 800 °C
Collections | ANU Research Publications |
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Date published: | 2007 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/30964 |
Source: | Journal of Physics: Condensed Matter |
DOI: | 10.1088/0953-8984/19/46/466202 |
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01_Ruffell_The_effect_of_the_annealing_2007.pdf | 305.5 kB | Adobe PDF | Request a copy |
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