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Nanoindentation-induced phase transformation in crystalline silicon and relaxed amorphous silicon

Rao, Rui; Bradby, Jodie; Ruffell, Simon; Williams, James

Description

Nanoindentation-induced phase transformation in both crystalline silicon (c-Si) and relaxed amorphous silicon (a-Si) have been studied. A series of nanoindentations were made with a sharp diamond Berkovich tip. During nanoindentations, maximum loads were

CollectionsANU Research Publications
Date published: 2007
Type: Journal article
URI: http://hdl.handle.net/1885/30746
Source: Microelectronics Journal
DOI: 10.1016/j.mejo.2007.04.006

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