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Growth of c-axis oriented GaN films on quartz by pulsed laser deposition

Wang, Rongping; Muto, H; Kusumori, Takeshi


We have successfully fabricated highly oriented GaN films on ZnO-buffered quartz by Nd:YAG pulsed laser deposition to develop large area and low cost optoelectronic devices. The quality of the films was investigated as functions of deposition temperature

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
Source: Optical Materials
DOI: 10.1016/S0925-3467(03)00052-1


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