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Nitrogen overgrowth as a catalytic mechanism during diamond chemical vapour deposition

Oberg, Lachlan; Batzer, Marietta; Stacey, Alastair; Doherty, Marcus


Nitrogen is frequently included in chemical vapour deposition feed gases to accelerate diamond growth. While there is no consensus for an atomistic mechanism of this effect, existing studies have largely focused on the role of sub-surface nitrogen and nitrogen-based adsorbates. In this work, we demonstrate the catalytic effect of surface-embedded nitrogen in nucleating new layers of (100) diamond. To do so we develop a model of nitrogen overgrowth using density functional theory. Nucleation of...[Show more]

CollectionsANU Research Publications
Date published: 2021
Type: Journal article
Source: Carbon
DOI: 10.1016/j.carbon.2021.03.008


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