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Characterization of a helicon plasma source in low diverging magnetic fields

Lafleur, Trevor; Charles, Christine; Boswell, Roderick


A detailed experimental characterization has been performed of a helicon mode in low nonuniform magnetic fields (B0 < 5 mT) for pressures between 0.04 Pa < p0 < 0.4 Pa and rf powers between 50W < P0 < 400W, using a number of electrostatic probes as well as circuit measurements of the antenna and matching network system. The helicon mode is produced over a narrow range of magnetic field values, where a distinct density peak is formed that becomes broader (and higher) as the power or pressure is...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/44/5/055202


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