Characterization of a helicon plasma source in low diverging magnetic fields
A detailed experimental characterization has been performed of a helicon mode in low nonuniform magnetic fields (B0 < 5 mT) for pressures between 0.04 Pa < p0 < 0.4 Pa and rf powers between 50W < P0 < 400W, using a number of electrostatic probes as well as circuit measurements of the antenna and matching network system. The helicon mode is produced over a narrow range of magnetic field values, where a distinct density peak is formed that becomes broader (and higher) as the power or pressure is...[Show more]
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|Source:||Journal of Physics D: Applied Physics|
|01_Lafleur_Characterization_of_a_helicon_2011.pdf||387.37 kB||Adobe PDF||Request a copy|
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